Improving the mechanical property of amorphous carbon films by silicon doping

Published 2018 View Full Article

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Title
Improving the mechanical property of amorphous carbon films by silicon doping
Authors
Keywords
Silicon-doped amorphous carbon film, Pulse arc, Mechanical property, Tribological property
Journal
DIAMOND AND RELATED MATERIALS
Volume 82, Issue -, Pages 137-142
Publisher
Elsevier BV
Online
2018-01-19
DOI
10.1016/j.diamond.2018.01.013

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