Effect of unbonded hydrogen on amorphous carbon film deposited by PECVD with annealing treatment

Published 2018 View Full Article

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Title
Effect of unbonded hydrogen on amorphous carbon film deposited by PECVD with annealing treatment
Authors
Keywords
Hydrogenated amorphous carbon, Unbonded hydrogen, Thermal stability, Graphitization, Micromorphology, Mechanical properties
Journal
DIAMOND AND RELATED MATERIALS
Volume 81, Issue -, Pages 146-153
Publisher
Elsevier BV
Online
2017-12-06
DOI
10.1016/j.diamond.2017.12.002

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