Atomic Layer Deposition of Aluminum Metal Films Using a Thermally Stable Aluminum Hydride Reducing Agent

Title
Atomic Layer Deposition of Aluminum Metal Films Using a Thermally Stable Aluminum Hydride Reducing Agent
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 30, Issue 6, Pages 1844-1848
Publisher
American Chemical Society (ACS)
Online
2018-03-13
DOI
10.1021/acs.chemmater.8b00445

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