Atomic Layer Deposition of Molybdenum Oxides with Tunable Stoichiometry Enables Controllable Doping of MoS2

Title
Atomic Layer Deposition of Molybdenum Oxides with Tunable Stoichiometry Enables Controllable Doping of MoS2
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 30, Issue 11, Pages 3628-3632
Publisher
American Chemical Society (ACS)
Online
2018-05-17
DOI
10.1021/acs.chemmater.8b01171

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