Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

Title
Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 30, Issue 10, Pages 3499-3507
Publisher
American Chemical Society (ACS)
Online
2018-05-07
DOI
10.1021/acs.chemmater.8b01271

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