Sol-gel derived low temperature HfO 2 -GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs)

Published 2018 View Full Article

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Title
Sol-gel derived low temperature HfO 2 -GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs)
Authors
Keywords
-
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2018-06-15
DOI
10.1016/j.ceramint.2018.06.056

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