Surface and in-depth distribution of sp 2 and sp 3 coordinated carbon atoms in diamond-like carbon films modified by argon ion beam bombardment during growth
Surface and in-depth distribution of sp 2 and sp 3 coordinated carbon atoms in diamond-like carbon films modified by argon ion beam bombardment during growth
Authors
Keywords
Angular-resolved X-ray induced photoelectron spectroscopy, ARXPS, C 1s, C KVV, Parameter D, C sp, /C sp, Argon gas cluster ion beam, ArGCIB, Maximum entropy method, MEM, Depth profile reconstruction
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