Inorganic material profiling using Ar n + cluster: Can we achieve high quality profiles?

Published 2018 View Full Article

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Title
Inorganic material profiling using Ar n + cluster: Can we achieve high quality profiles?
Authors
Keywords
SIMS, Ar clusters, Depth resolution, Mixing
Journal
APPLIED SURFACE SCIENCE
Volume 444, Issue -, Pages 633-641
Publisher
Elsevier BV
Online
2018-02-16
DOI
10.1016/j.apsusc.2018.02.159

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