Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiN x thin film deposited by magnetron co-sputtering

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Title
Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiN x thin film deposited by magnetron co-sputtering
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 456, Issue -, Pages 445-456
Publisher
Elsevier BV
Online
2018-06-20
DOI
10.1016/j.apsusc.2018.06.129

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