Smooth Interfacial Scavenging for Resistive Switching Oxide via the Formation of Highly Uniform Layers of Amorphous TaOx

Published 2018 View Full Article

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Title
Smooth Interfacial Scavenging for Resistive Switching Oxide via the Formation of Highly Uniform Layers of Amorphous TaOx
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 10, Issue 6, Pages 5609-5617
Publisher
American Chemical Society (ACS)
Online
2018-01-22
DOI
10.1021/acsami.7b15384

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