Journal
ACS SENSORS
Volume 2, Issue 8, Pages 1167-1174Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acssensors.7b00289
Keywords
gas preconcentrator; microelectromechanical systems (MEMS); chemical sensor; sorbent; detectors
Funding
- Hartwell Foundation
- NIH National Center for Advancing Translational Sciences (NCATS) [UL1 TR000002]
- NIH award [U01 EB0220003-01, 1P30ES023513-01A1, UG3-OD023365, T32 HL07013, P42ES004699]
- NSF [1255915]
- National Science Foundation Graduate Research Fellowship Program
- Div Of Biological Infrastructure
- Direct For Biological Sciences [1255915] Funding Source: National Science Foundation
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We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 degrees C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.0320.033 min), suggesting reproducibility between devices.
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