A monitoring method of semiconductor manufacturing processes using Internet of Things–based big data analysis

Title
A monitoring method of semiconductor manufacturing processes using Internet of Things–based big data analysis
Authors
Keywords
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Journal
International Journal of Distributed Sensor Networks
Volume 13, Issue 7, Pages 155014771772181
Publisher
SAGE Publications
Online
2017-07-22
DOI
10.1177/1550147717721810

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