Sub-60-mV/decade Negative Capacitance FinFET With Sub-10-nm Hafnium-Based Ferroelectric Capacitor

Title
Sub-60-mV/decade Negative Capacitance FinFET With Sub-10-nm Hafnium-Based Ferroelectric Capacitor
Authors
Keywords
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Journal
IEEE Journal of the Electron Devices Society
Volume 5, Issue 5, Pages 306-309
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-07-25
DOI
10.1109/jeds.2017.2731401

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