A Ferroelectric Thin Film Transistor Based on Annealing-Free HfZrO Film

Title
A Ferroelectric Thin Film Transistor Based on Annealing-Free HfZrO Film
Authors
Keywords
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Journal
IEEE Journal of the Electron Devices Society
Volume 5, Issue 5, Pages 378-383
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-07-27
DOI
10.1109/jeds.2017.2732166

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