Novel CMOS-Compatible Mo–AlN–Mo Platform for Metamaterial-Based Mid-IR Absorber

Title
Novel CMOS-Compatible Mo–AlN–Mo Platform for Metamaterial-Based Mid-IR Absorber
Authors
Keywords
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Journal
ACS Photonics
Volume 4, Issue 2, Pages 302-315
Publisher
American Chemical Society (ACS)
Online
2017-01-18
DOI
10.1021/acsphotonics.6b00672

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