CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure

Title
CMOS-Compatible Fabrication for Photonic Crystal-Based Nanofluidic Structure
Authors
Keywords
Photonic crystal, PC-based nanofluidic structure, CMOS-compatible process, Periodical Si<sub>3</sub>N<sub>4</sub> gratings
Journal
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
Publisher
Springer Nature
Online
2017-02-09
DOI
10.1186/s11671-017-1849-7

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