Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry
Published 2017 View Full Article
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Title
Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry
Authors
Keywords
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Journal
Scientific Reports
Volume 7, Issue 1, Pages -
Publisher
Springer Nature
Online
2017-05-23
DOI
10.1038/s41598-017-02515-4
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Related references
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- (2012) Alexander G. Krause et al. Nature Photonics
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- Green light emission in silicon through slow-light enhanced third-harmonic generation in photonic-crystal waveguides
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