Comparison of InGaAs and InAlAs sacrificial layers for release of InP-based devices

Title
Comparison of InGaAs and InAlAs sacrificial layers for release of InP-based devices
Authors
Keywords
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Journal
Optical Materials Express
Volume 7, Issue 12, Pages 4408
Publisher
The Optical Society
Online
2017-11-21
DOI
10.1364/ome.7.004408

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