Equipment and processes of vacuum electron-ion plasma surface engineering

Title
Equipment and processes of vacuum electron-ion plasma surface engineering
Authors
Keywords
Surface engineering, Nitriding, Coating deposition, Electron beam, Ion plasma treatment
Journal
VACUUM
Volume 143, Issue -, Pages 464-472
Publisher
Elsevier BV
Online
2017-04-08
DOI
10.1016/j.vacuum.2017.04.016

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