Synergistic enhancement effect between external electric and magnetic fields during high power impulse magnetron sputtering discharge

Published 2017 View Full Article

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Title
Synergistic enhancement effect between external electric and magnetic fields during high power impulse magnetron sputtering discharge
Authors
Keywords
High power impulse magnetron sputtering, Magnetic field confined, Auxiliary anode, Plasma density, Ionization rate
Journal
VACUUM
Volume 143, Issue -, Pages 119-128
Publisher
Elsevier BV
Online
2017-07-24
DOI
10.1016/j.vacuum.2017.06.007

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