One-step synthesis of polycrystalline V 2 AlC thin films on amorphous substrates by magnetron co-sputtering

Published 2017 View Full Article

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Title
One-step synthesis of polycrystalline V 2 AlC thin films on amorphous substrates by magnetron co-sputtering
Authors
Keywords
MAX phases, Magnetron co-sputtering, Non-epitaxial growth, Preferred orientation, Polymorphic crystallization
Journal
VACUUM
Volume 146, Issue -, Pages 106-110
Publisher
Elsevier BV
Online
2017-09-19
DOI
10.1016/j.vacuum.2017.08.049

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