Three-dimensional imaging of individual point defects using selective detection angles in annular dark field scanning transmission electron microscopy

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Title
Three-dimensional imaging of individual point defects using selective detection angles in annular dark field scanning transmission electron microscopy
Authors
Keywords
Scanning transmission electron microscopy, Point defects, Electron channeling, Atomic scale 3D information
Journal
ULTRAMICROSCOPY
Volume 172, Issue -, Pages 17-29
Publisher
Elsevier BV
Online
2016-10-19
DOI
10.1016/j.ultramic.2016.10.007

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