FIB based fabrication of an operative Pt/HfO 2 /TiN device for resistive switching inside a transmission electron microscope

Published 2017 View Full Article

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Title
FIB based fabrication of an operative Pt/HfO 2 /TiN device for resistive switching inside a transmission electron microscope
Authors
Keywords
In situ TEM biasing, Resistive switching device, Metal-insulator-metal structure, Focused ion beam, Electrical characterization, Specimen preparation, Operando
Journal
ULTRAMICROSCOPY
Volume 181, Issue -, Pages 144-149
Publisher
Elsevier BV
Online
2017-04-21
DOI
10.1016/j.ultramic.2017.04.008

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