Fabrication of Thin Films of α-Fe2O3 via Atomic Layer Deposition Using Iron Bisamidinate and Water under Mild Growth Conditions

Published 2015 View Full Article

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Title
Fabrication of Thin Films of α-Fe2O3 via Atomic Layer Deposition Using Iron Bisamidinate and Water under Mild Growth Conditions
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 7, Issue 30, Pages 16138-16142
Publisher
American Chemical Society (ACS)
Online
2015-07-21
DOI
10.1021/acsami.5b04043

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