Challenges in the industrial deposition of transparent conductive oxide materials by reactive magnetron sputtering from rotatable targets

Published 2017 View Full Article

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Title
Challenges in the industrial deposition of transparent conductive oxide materials by reactive magnetron sputtering from rotatable targets
Authors
Keywords
Reactive magnetron sputtering, Indium tin oxide, Aluminium-doped zinc oxide, Tube target, Hysteresis, Film property distribution
Journal
THIN SOLID FILMS
Volume 634, Issue -, Pages 149-154
Publisher
Elsevier BV
Online
2017-03-07
DOI
10.1016/j.tsf.2017.03.006

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