Preparation and characterization of molybdenum disulfide films obtained by one-step atomic layer deposition method

Published 2017 View Full Article

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Title
Preparation and characterization of molybdenum disulfide films obtained by one-step atomic layer deposition method
Authors
Keywords
Atomic layer deposition, MoS, 2, thin film, Growth temperature, Substrate, Crystal structure
Journal
THIN SOLID FILMS
Volume 624, Issue -, Pages 101-105
Publisher
Elsevier BV
Online
2017-01-10
DOI
10.1016/j.tsf.2017.01.015

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