Effects of plasma treatment on the electrical reliability of multilayer MoS 2 field-effect transistors

Published 2017 View Full Article

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Title
Effects of plasma treatment on the electrical reliability of multilayer MoS 2 field-effect transistors
Authors
Keywords
Molybdenum disulfide, Field effect transistor, Plasma treatment, Passivation, Raman spectroscopy
Journal
THIN SOLID FILMS
Volume 637, Issue -, Pages 32-36
Publisher
Elsevier BV
Online
2017-02-08
DOI
10.1016/j.tsf.2017.02.014

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