Wrinkling patterns in metal films sputter deposited on viscoelastic substrates

Published 2017 View Full Article

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Title
Wrinkling patterns in metal films sputter deposited on viscoelastic substrates
Authors
Keywords
Metal film, Viscoelastic substrate, Wrinkling, Internal stress
Journal
THIN SOLID FILMS
Volume 638, Issue -, Pages 230-235
Publisher
Elsevier BV
Online
2017-07-20
DOI
10.1016/j.tsf.2017.07.051

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