Vacuum field-effect transistor with a deep submicron channel fabricated by electro-forming

Published 2017 View Full Article

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Title
Vacuum field-effect transistor with a deep submicron channel fabricated by electro-forming
Authors
Keywords
Vacuum field-effect transistor, Surface conduction electron emitter, Deep submicron scale channel, Electro-forming
Journal
SOLID-STATE ELECTRONICS
Volume 132, Issue -, Pages 1-5
Publisher
Elsevier BV
Online
2017-03-03
DOI
10.1016/j.sse.2017.03.002

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