Pressure free nanoimprinting lithography using ladder-type HSQ material for LSPR biosensor chip

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Title
Pressure free nanoimprinting lithography using ladder-type HSQ material for LSPR biosensor chip
Authors
Keywords
Biosensor, HSQ, Immunoassay, LSPR, NIL
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 242, Issue -, Pages 47-55
Publisher
Elsevier BV
Online
2016-11-09
DOI
10.1016/j.snb.2016.11.030

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