CMOS compatible nanoscale thermal conductivity detector for gas sensing applications

Published 2017 View Full Article

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Title
CMOS compatible nanoscale thermal conductivity detector for gas sensing applications
Authors
Keywords
Nanowire, Thermal conductivity detector, Gas detector
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 261, Issue -, Pages 9-13
Publisher
Elsevier BV
Online
2017-04-24
DOI
10.1016/j.sna.2017.04.036

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