Deflection behavior of a piezo-driven flexible actuator for vacuum micropumps

Title
Deflection behavior of a piezo-driven flexible actuator for vacuum micropumps
Authors
Keywords
Flexible actuator, Vacuum micropump, Deflection behavior, Elastic model
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 267, Issue -, Pages 30-41
Publisher
Elsevier BV
Online
2017-09-30
DOI
10.1016/j.sna.2017.09.029

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