Anodic processes in the chemical and electrochemical etching of Si crystals in acid-fluoride solutions: Pore formation mechanism

Published 2017 View Full Article

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Title
Anodic processes in the chemical and electrochemical etching of Si crystals in acid-fluoride solutions: Pore formation mechanism
Authors
Keywords
-
Journal
SEMICONDUCTORS
Volume 51, Issue 4, Pages 458-472
Publisher
Pleiades Publishing Ltd
Online
2017-04-20
DOI
10.1134/s1063782617040212
References
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