GaAs-based micro/nanomechanical resonators

Published 2017 View Full Article

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Title
GaAs-based micro/nanomechanical resonators
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 32, Issue 10, Pages 103003
Publisher
IOP Publishing
Online
2017-08-10
DOI
10.1088/1361-6641/aa857a

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