High-performance facility and techniques for high-precision machining of optical components by ion beams

Published 2017 View Full Article

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Title
High-performance facility and techniques for high-precision machining of optical components by ion beams
Authors
Keywords
Roughness, Polishing, Aspherics, Optical fabrication, X-rays, Soft x-rays, Extreme ultraviolet (EUV)
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 48, Issue -, Pages 338-346
Publisher
Elsevier BV
Online
2017-01-21
DOI
10.1016/j.precisioneng.2017.01.004

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