A High-Performance Refractive Index Sensor Based on Fano Resonance in Si Split-Ring Metasurface

We present a high-performance refractive index sensor based on Fano resonance with a figure of merit (FOM) about 56.5 in all-dielectric metasurface which consists of a periodically arranged silicon rings with two equal splits dividing them into pairs of arcs of different lengths. A Fano resonance with quality factor similar to 133 and spectral contrast ratio similar to 100% arises from destructive interference of two antiphase electric dipoles in the two arcs of the split-ring. We can turn on and/or off the Fano resonance with a modulation depth nearly 100% at the operating wavelength of 1067 nm by rotating the polarization of incident light. We believe that our results will open up avenues for the development of applications using Fano resonance with dynamically controllability such as biochemical sensors, optical switching, and modulator.