Effects of direct current discharge on the spatial distribution of cylindrical inductively-coupled plasma at different gas pressures

Published 2017 View Full Article

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Title
Effects of direct current discharge on the spatial distribution of cylindrical inductively-coupled plasma at different gas pressures
Authors
Keywords
-
Journal
PLASMA SCIENCE & TECHNOLOGY
Volume 20, Issue 1, Pages 014005
Publisher
IOP Publishing
Online
2017-11-28
DOI
10.1088/2058-6272/aa8ea8

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