Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 7, Issue 4, Pages 2160-2165Publisher
AMER CHEMICAL SOC
DOI: 10.1021/am5077809
Keywords
microlens array; ultrathin fluorocarbon; hydrophobic effect; surface energy; thermal reflow
Funding
- National Research Foundation of Korea (NRF) grant - Korea government (MEST) [2014022751, 2014039957, 2011-0031866, 10041120]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10041120] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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This work reports a novel method for monolithic fabrication of high numerical aperture polymer microlens arrays (high-NA MLAs) with high packing density (PD) at wafer level. The close-packed high-NA MLAs were fabricated by incorporating conformal deposition of ultrathin fluorocarbon nanofilm and melting the cylindrical polymer islands. The NA and PD of hemispherical MLAs with a hexagonal arrangement increase up to 0.6 and 89%, respectively. The increase of NA enhances the lens transmission securing the beam width down to 1.1 mu m. The close-packed high-NA MLAs enable high photon collection efficiency with signal-to-noise ratio greater than 50:1.
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