Effect of substrate temperature on structural, morphological, optical and electrical properties of IGZO thin films

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Title
Effect of substrate temperature on structural, morphological, optical and electrical properties of IGZO thin films
Authors
Keywords
Gallium, Indium, Co-doping, Spray pyrolysis, IGZO, ZnO
Journal
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES
Volume 86, Issue -, Pages 164-167
Publisher
Elsevier BV
Online
2016-10-25
DOI
10.1016/j.physe.2016.10.029

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