Observation of abnormal mobility enhancement in multilayer MoS 2 transistor by synergy of ultraviolet illumination and ozone plasma treatment

Published 2017 View Full Article

Authors

Keywords

MoS, 2, Synergy, UV/ozone plasma treatment, Mobility enhancement, Field-effect transistors

Journal

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES

Volume 87, Issue -, Pages 150-154

Publisher

Elsevier BV

Online

2016-12-10

DOI

10.1016/j.physe.2016.12.004

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