Study of surface exfoliation on 6H-SiC induced by H2+ implantation

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Title
Study of surface exfoliation on 6H-SiC induced by H2+ implantation
Authors
Keywords
Smart-cut, H, 2, implantation, Transmission electron microscopy, Exfoliation, Blisters
Journal
PHYSICA B-CONDENSED MATTER
Volume 508, Issue -, Pages 104-111
Publisher
Elsevier BV
Online
2016-12-23
DOI
10.1016/j.physb.2016.12.027

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