4.7 Article

Microscopic structured light 3D profilometry: Binary defocusing technique vs. sinusoidal fringe projection

Journal

OPTICS AND LASERS IN ENGINEERING
Volume 96, Issue -, Pages 117-123

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2016.06.009

Keywords

High-speed; High-resolution; Microscopic; Binary defocusing; Telecentric lens

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Funding

  1. National Science Foundation (NSF) [CMMI-1531048]

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This paper compares the binary defocusing technique with conventional sinusoidal fringe projection under two different 3D microscopic profilometry systems: (1) both camera and projector use telecentric lenses and (2) only camera uses a telecentric lens. Our simulation and experiments found that the binary defocusing technique is superior to the traditional sinusoidal fringe projection method by improving the measurement resolutiori approximately 19%. Finally, by taking the speed advantage of the binary defocusing technique, we presented a high-speed (500 Hz) and high-resolution (1600 x 1200) 3D microscopic profilometry system that could reach kHz. (C) 2016 Elsevier Ltd. All rights reserved.

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