Analysis of the properties of functional titanium dioxide thin films deposited by pulsed DC magnetron sputtering with various O 2 :Ar ratios

Published 2017 View Full Article

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Title
Analysis of the properties of functional titanium dioxide thin films deposited by pulsed DC magnetron sputtering with various O 2 :Ar ratios
Authors
Keywords
TiO, 2, Nanocrystalline thin films, Magnetron sputtering, Microstructure, Surface and optical properties, Hardness
Journal
OPTICAL MATERIALS
Volume 69, Issue -, Pages 96-104
Publisher
Elsevier BV
Online
2017-04-16
DOI
10.1016/j.optmat.2017.04.021

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