Reducing the thermal stress in a heterogeneous material stack for large-area hybrid optical silicon-lithium niobate waveguide micro-chips

Published 2017 View Full Article

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Title
Reducing the thermal stress in a heterogeneous material stack for large-area hybrid optical silicon-lithium niobate waveguide micro-chips
Authors
Keywords
Thin films, Thermal stress, Lithium niobate, Hybrid optical waveguides
Journal
OPTICAL MATERIALS
Volume 66, Issue -, Pages 605-610
Publisher
Elsevier BV
Online
2017-03-17
DOI
10.1016/j.optmat.2017.03.014

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