Nuclear microprobe performance in high-current proton beam mode for micro-PIXE

Published 2017 View Full Article

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Title
Nuclear microprobe performance in high-current proton beam mode for micro-PIXE
Authors
Keywords
PIXE, Focused ion beam, Elemental mapping, Element quantification, Lateral resolution, Proton beam focusing
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 404, Issue -, Pages 69-73
Publisher
Elsevier BV
Online
2017-01-29
DOI
10.1016/j.nimb.2017.01.023

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