Fabrication of monolithic microfluidic channels in diamond with ion beam lithography

Published 2017 View Full Article

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Title
Fabrication of monolithic microfluidic channels in diamond with ion beam lithography
Authors
Keywords
Deep ion beam lithography, Diamond, Microfluidic, Fluorescent imaging
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 404, Issue -, Pages 193-197
Publisher
Elsevier BV
Online
2017-02-14
DOI
10.1016/j.nimb.2017.01.062

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