A process modification for CMOS monolithic active pixel sensors for enhanced depletion, timing performance and radiation tolerance

Published 2017 View Full Article

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Title
A process modification for CMOS monolithic active pixel sensors for enhanced depletion, timing performance and radiation tolerance
Authors
Keywords
Monolithic active pixel detectors (MAPS), CMOS detectors, Radiation tolerance, Pixel detectors
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Volume 871, Issue -, Pages 90-96
Publisher
Elsevier BV
Online
2017-08-01
DOI
10.1016/j.nima.2017.07.046

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