Layer-controlled precise fabrication of ultrathin MoS2 films by atomic layer deposition

Title
Layer-controlled precise fabrication of ultrathin MoS2 films by atomic layer deposition
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 28, Issue 19, Pages 195605
Publisher
IOP Publishing
Online
2017-03-22
DOI
10.1088/1361-6528/aa6827

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