Atomic layer deposited oxide films as protective interface layers for integrated graphene transfer

Published 2017 View Full Article

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Title
Atomic layer deposited oxide films as protective interface layers for integrated graphene transfer
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 28, Issue 48, Pages 485201
Publisher
IOP Publishing
Online
2017-10-17
DOI
10.1088/1361-6528/aa940c

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