Journal
NANO LETTERS
Volume 17, Issue 3, Pages 1504-1511Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.6b04546
Keywords
Raman spectroscopy; Raman tomography; suspended graphene; noninvasive; strain; doping; nanoelectromechanical systems; NEMS; MEMS; 2D materials
Categories
Funding
- German Federal Ministry of Education and Research (BMBF, NanoGraM) [03XP0006]
- European Research Council (ERC, InteGraDe) [3017311]
- German Research Foundation [DFG LE 2440/1-2]
- Spanish Ministry of Economy and Competitiveness (MINECO, NanoGraM) [CDTI IDI-20150827, SPRI IG-2015/0001026]
Ask authors/readers for more resources
Graphene has extraordinary mechanical and electronic properties, making it a promising material for membrane based nanoelectromechanical systems (NEMS). Here, chemical-vapor-deposited graphene is transferred onto target substrates to suspend it over cavities and trenches for pressure-sensor applications. The development of such devices requires suitable metrology methods, i.e., large-scale characterization techniques, to confirm and analyze successful graphene transfer with intact suspended graphene membranes. We propose fast and noninvasive Raman spectroscopy mapping to distinguish between freestanding and substrate-supported graphene, utilizing the different strain and doping levels. The technique is expanded to combine two-dimensional area scans with cross-sectional Raman spectroscopy, resulting in three-dimensional Raman tomography of membrane-based graphene NEMS. The potential of Raman tomography for in-line monitoring is further demonstrated with a methodology for automated data analysis to spatially resolve the material composition in micrometer-scale integrated devices, including free-standing and substrate-supported graphene. Raman tomography may be applied to devices composed of other two-dimensional materials as well as silicon micro- and nanoelectromechanical systems.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available